Aydinoglu, F. Et Al. 2017. Chromium oxide as a hard mask material better than metallic chromium. Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics , vol.35, no.6 .

Aydinoglu, F., Saffih, F., Dey, R. K., & Cui, B., (2017). Chromium oxide as a hard mask material better than metallic chromium. Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics , vol.35, no.6.

Aydinoglu, Ferhat Et Al. "Chromium oxide as a hard mask material better than metallic chromium," Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics , vol.35, no.6, 2017

Aydinoglu, Ferhat Et Al. "Chromium oxide as a hard mask material better than metallic chromium." Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics , vol.35, no.6, 2017

Aydinoglu, F. Et Al. (2017) . "Chromium oxide as a hard mask material better than metallic chromium." Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics , vol.35, no.6.

@article{article, author={Ferhat Aydinoglu Et Al. }, title={Chromium oxide as a hard mask material better than metallic chromium}, journal={Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics}, year=2017}